电容式压力传感器是一种利用电容敏感元件将被测压力转换成与之成一定关系的电量输出的压力传感器。其工作原理是,一般采用圆形金属薄膜或镀金属薄膜作为电容器的一个电极,当薄膜感受压力而变形时,薄膜与固定电极之间形成的电容量发生变化,通过测量电路即可输出与电压成一定关系的电信号。
电容式压力传感器属于极距变化型电容式传感器,CTC--SC203-100A-002IR-010-01K-05可分为单电容式压力传感器和差动电容式压力传感器。单电容式压力传感器由圆形薄膜与固定电极构成,薄膜在压力的作用下变形,从而改变电容器的容量。其灵敏度大致与薄膜的面积和压力成正比,而与薄膜的张力和薄膜到固定电极的距离成反比。另一种型式的固定电极取凹形球面状,膜片为周边固定的张紧平面,膜片可用塑料镀金属层的方法制成,这种型式适于测量低压,并有较高过载能力。
此外,还可以采用带活塞动极膜片制成测量高压的单电容式压力传感器,这种传感器适于测量动态高压和对飞行器进行遥测。
电容式压力传感器具有输入能量低、高动态响应、自然效应小、环境适应性好等优点,因此在工业自动化、机械设备、交通运输、航空航天等领域有广泛应用。

Capacitive pressure sensor is a kind of pressure sensor which uses capacitive sensor to convert the measured pressure into a certain relationship with the power output. The working principle is that the circular metal film or gold-plated film is generally used as an electrode of the capacitor, when the film feels the pressure and deforms, the capacitance formed between the film and the fixed electrode changes, and the electrical signal can be output with a certain relationship between the voltage through the measurement circuit.
Capacitive pressure sensor belongs to the polar distance change type capacitive sensor, CTC-SC203-100A-002IR-010-01K-05 can be divided into single capacitive pressure sensor and differential capacitive pressure sensor. The single-capacitive pressure sensor is composed of a circular film and a fixed electrode. The film deforms under the action of pressure, thus changing the capacity of the capacitor. The sensitivity is roughly proportional to the area and pressure of the film, and inversely proportional to the tension of the film and the distance from the film to the fixed electrode. The other type of fixed electrode is concave spherical shape, and the diaphragm is a tensioning plane fixed around the periphery. The diaphragm can be made by the method of plastic gold plating. This type is suitable for measuring low pressure and has high overload capacity.
In addition, a single capacitive pressure sensor with piston moving pole diaphragm can be used to measure high pressure, which is suitable for measuring dynamic high pressure and telemetry of aircraft.
Capacitive pressure sensor has the advantages of low input energy, high dynamic response, small natural effect and good environmental adaptability, so it is widely used in industrial automation, mechanical equipment, transportation, aerospace and other fields.
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